JPH0474467U - - Google Patents
Info
- Publication number
- JPH0474467U JPH0474467U JP11874690U JP11874690U JPH0474467U JP H0474467 U JPH0474467 U JP H0474467U JP 11874690 U JP11874690 U JP 11874690U JP 11874690 U JP11874690 U JP 11874690U JP H0474467 U JPH0474467 U JP H0474467U
- Authority
- JP
- Japan
- Prior art keywords
- silicon
- chamber
- substrate
- silicon substrate
- communication hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 9
- 229910052710 silicon Inorganic materials 0.000 claims description 9
- 239000010703 silicon Substances 0.000 claims description 9
- 239000000758 substrate Substances 0.000 claims description 9
- 239000000654 additive Substances 0.000 claims 1
- 239000000463 material Substances 0.000 claims 1
- 238000007789 sealing Methods 0.000 claims 1
- 239000002210 silicon-based material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 6
Landscapes
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11874690U JPH0474467U (en]) | 1990-11-13 | 1990-11-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11874690U JPH0474467U (en]) | 1990-11-13 | 1990-11-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0474467U true JPH0474467U (en]) | 1992-06-30 |
Family
ID=31866699
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11874690U Pending JPH0474467U (en]) | 1990-11-13 | 1990-11-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0474467U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010501810A (ja) * | 2006-08-29 | 2010-01-21 | ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング | 流体流を制御するためのモジュールの製造方法および該方法により製造されたモジュール |
-
1990
- 1990-11-13 JP JP11874690U patent/JPH0474467U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010501810A (ja) * | 2006-08-29 | 2010-01-21 | ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング | 流体流を制御するためのモジュールの製造方法および該方法により製造されたモジュール |
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